Feature

• Band Heater + Pad Heater + Airflow control module + cover
• 146 (W) x 120(D) x 225 (H)
• GI + Heat resistant paint (black)

Function

MFA system is applied to various semiconductor process facilities such as CVD, Metal, Etching, Diffusion and Implant to improve exhaust efficiency.

• Maximizing pipe protection through heat flow control
• Efficient exhaust gas movement mechanism through rotating airflow
• PID control for precise temperature control
• Automatic tuning process for automatic optimization
• RS485 communication for sending and receiving control data
• Operation status monitoring of interface heater system possible
• Bimetal cutoff to prevent overheating