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    DUAL CONTAINMENT TUBE
  • Features
  • · 各薬液に対応する配管を色分けし、危険要因を最大限に抑え、目を保護
  • · 長距離施工によるLeak Pointの最小化
  • · 一体型施工による作業効率の向上・30％のコスト削減
  • · 優れた摩耗力・耐摩耗性
  • · 使用温度の上限値5000℉ (260℃)
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    EP COIL TUBE
  • Maker Introduce

Maker

Introduce

  • 特殊配管部品およびサービスを提供
  • ISO規格Class-10クリーンルームで洗浄、テスト、梱包を進行
  • EP-Coil Tube Evaluation Data

Particle test #1 – 180º Bending → Straight restoration

※10Min（分）以降Particle未検出確認（人に対するエラーも10分以内に解決）

Particle test #2 – Roller Use Straight Bending

  • How to install EP-TUBE (COil : Stick) #1

ⓐ Coil Tube 施工（改善案）

ⓑ Stick Tube (既存)

  • How to install EP-TUBE (COil : Stick) #2
  • Why use EP-Coil Tube?

SUS 配管溶接

  • – 高温の熱で溶接棒を溶融させて配管-配管接続の方法
  • – 溶接棒成分表

グローバル企業EP-Coilの適用

  • – TSMC、Intel、Micronなど2016年から新規ライン適用

EP-Coil Tube 適用

  • – 溶接箇所減少 = Weak point 減少 → Metal 溶出点減少
  • – 400M作業時の溶接箇所
  • 直管機
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    FFKMフッ素O-RING
  • Solrez’s selection guide for process
Process Compound Number Service temp(oC) Color Equivalent Compound
Metal CVD Process
LP-CVD
Oxidation
Diffusion
Lamp Anneal
RTP
Ash
ALD		 8318 320 Light yellow 4079,8900
7075UP,653
8107 320 Black 4079,8900
7075UP,653
9578 300 Light yellow 9100, 9300M
XRZ
9575 300 White 8475, 8575
9568 280 Light yellow 8002
9566 280 White E-38
Wet Etching
Photo litho-graypy
Stripping
Copper plating		 9308 250 Light yellow 8002.93
9307 250 Black 6375UP
7709 230 Amver translucent Amor crystal
7708 230 Light yellow Ultic Armor
6907 220 Black -
6607 250 Black Fluoraz888
5901 200 Blue -
  • Solrez’s Compound selection guide
Compound number Service temp(oC) Color Equlvalent Compound Recommend Processing
8318 320 Light yellow 4079,8900,7075UP,653 Oxidation diffusion(02,N2,CI2)
Metal CVD(NF3,SiH4,F2,CI2)
8107 320 Black 4079,8900,7075UP,653 Oxidation diffusion(02,N2,CI2)
Metal CVD(NF3,SiH4,F2,CI2)
9578 300 Light yellow 9100,9300,XRZ PECVD/ALD/HDPCVD
(TMS,SiH4,NH3,NF3,SiF4)
9575 300 White 8475,8575 Infrared light
9568 280 Light yellow 8002 Ash(2,CF4,NH3,CHF3),Dry etch
9566 280 White E-38 Ash(2,CF4,NH3,CHF3),Dry etch
9308 280 Light yellow 8002,9300 Wet etch,strip,copper plating
(HN03,HF,H3PO4,H202,CuSO4)
9307 250 Black 6375UP
7709 230 Amber translucent Amor crystal All CVD,Dry etch and plasma ashing
equipment For semiconductor and LCD
7708 230 Light yellow Ultic Armor
6907 220 Black - Excellent solvent resistance(FKM)
6607 250 Black Fluoraz888 Wet etch
5901 220 Blue - O2,O3 Plasma
  • High temperature FFKM special O-ring
  • Grade: Solrez8318
  • Material: FFKM
  • Service temp: 320℃
  • Color: light yellow
  • Hardness: 75(shore A)
  • Tensile strength: 14.2MPa
  • Elongation: 210%
  • Compression set: 18%(270℃ x 72hrs)
  • Application:
    – Oxidation diffusion(O2,N2,CI2)
    – Metal CVD(NF3,SiH4,F2,CI2)
  • Grade: Solrez8107
  • Material: FFKM
  • Service temp: 320℃
  • Color: Black/li>
  • Hardness: 75(shore A)
  • Tensile strength: 12.2MPa
  • Elongation: 180%
  • Compression set: 18%(200℃ x 72hrs)
  • Application:
    – Oxidation diffusion(O2,N2,CI2)
    – Metal CVD(NF3,SiH4,F2,CI2)

CSPが提供する製品一覧です。